- Measuring Microscope TUM series
H type : TUM-300EHN/220EHN/170EHN
S type : TUM-300ESN/220ESN/170ESN
H type
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TUM-300EHN TUM-220EHN TUM-170EHN -
S type
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TUM-300ESN TUM-220ESN TUM-170ESN
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Best for super-precision inspection.
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Wider measurement range than the traditional industrial microscopes.
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High precision, and to maintain its high precision consistently, straightness is assured by making the table low and long, and the guide way long.
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Standard scale is a linear incremental measurement system manufactured by Hidenhain Co.. A high level of resolution and measurement precision can be obtained through a glass scale by evaporation and photoelectric scanning.(H type)
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The standard scale is a Sony magnescale which is known for stable precision, resistance against oil and dirt, and the environment. (S type)
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Connected to a measurement data processing unit which enables calculations of coordinate change, distance, angle, and etc. , resulting in a labor savings.
Specifications
Type 300EHN 220EHN 170EHN 300ESN 220ESN 170ESN Measuring range X 300mm 220mm 170mm 300mm 220mm 170mm Y 100mm 100mm 75mm 100mm 100mm 75mm Focus range 220mm 180mm 150mm 220mm 180mm 150mm Precision
(microns)2.0+ L/100 1.3+ L/200 3.0+ L/100 2.0+ L/100 ( L indicate amount of movement in increments of mm) Minimum display 0.5microns 0.1microns 0.5microns Size of surface 130 X 344mm 140 X 280mm 200mm dia. 130 X 344mm 140 X 280mm 200mm dia. Maximum weight of object Approx.10kg Approx.30kg Approx.20kg Approx.10kg Approx.30kg Approx.20kg
Objective lens Magnification 1 X 3 X 5 X (Standard) 10 X 20 X Diameter of field 21mm 7mm 4.2mm 2.1mm 1.05mm Depth of focus ±760microns ±110microns ±40microns ±10microns ±3.5microns Operating distance 60mm 75mm 64mm 54mm 22mm